Ing. Daniel MACHAJDÍK, CSc.


Fröhlich, K., Hudec, B., Aarik, J., Tarre, A., MachajdíkD., Kasikov, A., Hušeková, K., and Gaži, Š.: Post-deposition processing and oxygen content of TiO2-based capacitors, Microelectr. Engn. 88 (2011) 1525-1528.


Hušeková, K., Jurkovič, M., Čičo, K., MachajdíkD., Dobročka, E., Lupták, R., Macková, A., and Frőhlich, K.: Preparation of high permitivity GdScO3 films by liquid injection MOCVD, ECS Trans. 25 (2009) 1061.

Frőhlich, K., Vincze, A., Dobročka, E., Hušeková, K., Čičo, K., Uherek, F., Lupták, R., Ťapajna, M., and MachajdíkD.: Thermal stability of GdScO3 dielectric films grown on Si and InAlN/GaN substrates, Mater. Res. Soc. Symp. Proc. 1155 (2009) C09-03.


MachajdíkD., Kobzev, A. P., Hušeková, K., Ťapajna, M., Fröhlich, K., and Schram, T.: Thermal stability of advanced gate stacks consisting of a Ru electrode and Hf-based gate dielectrics for CMOS technology, Vacuum 81 (2007) 1379-1384.


Ťapajna, M., Hušeková, K., MachajdíkD., Kobzev, A. P., Schram, T., Lupták, R., Harmatha, L., and Fröhlich, K.: Electrical properties and thermal stability of MOCVD grown Ru gate electrodes for advanced CMOS technology, Microelectr. Engn. 83 (2006) 2412.

Rossel, C., Rosová, A., Hušeková, K., MachajdíkD., and Fröhlich, K.: Phase stability of La0.5Sr0.5CoO3-y films upon annealing in hydrogen atmosphere, J. Applied Phys. 100 (2006) 044501-1-6.


MachajdíkD., Kobzev, A.P., and Fröhlich, K.: Complementarity of X-ray diffraction and RBS in thin film characterization, Vacuum 78 (2005) 455-461.

Lupták, R., Fröhlich, K., Rosová, A., Hušeková, K., Ťapajna, M., MachajdíkD., Jergel, M., Espinós, J.P., and Mansilla, C.: Growth of gadolinum oxide films for advanced MOS structure, Microelectr. Engn. 80 (2005) 154-157.

Vincenc Oboňa, J., Chromik, Š., MachajdíkD., Kostič, I., and Kadlečíková, M.: Synthesis and electrical properties of thin films of fullerites on the various substrates, Acta Physica Slovaca 55 (2005) 411-416.

Lupták, R., Fröhlich, K., Hušeková, K., Ťapajna, M., MachajdíkD., Jergel, M., Espinós, J.P., and Mansilla, C.: Structure and electrical properties of the thin Gd2O3 films. In: APCOM 2005: Proc. 11th Inter. Workshop on Applied Phys. Condensed Matter. Eds.: D. Pudiš et al. Žilina: ŽU, 2005. ISBN: 80-8070-411-2. P. 200-203.


Fröhlich, K., Hušeková, K., MachajdíkD., Lupták, R., Ťapajna, M., Hooker, J.C., Roozeboom, F., Kobzev, A.P., Wiemer, C., Ferrari, C., Fanciulli, M., Rossel, C., and Cabral, C. Jr.: Preparation of SrRuO3 films for advanced CMOS metal gates, Materials Sci Semicond. Process. 7 (2004) 265-269.

Písečný, P., Hušeková, K., Fröhlich, K., Harmatha, L., Šoltýs, J., MachajdíkD., Espinos, J.P., Jergel, M., and Jakabovič, J.: Growth of lanthanium oxide films for application as a gate dielectrics in CMOS technology, Materials Sci Semicond. Process. 7 (2004) 231-236.

Fröhlich, K., Hušeková, K., MachajdíkD., Hooker, J.C., Perez, N., Fanciulli, M., Ferrari, S., Wiemer, C., Dimoulas, A., Vellianitis, G., and Roozeboom, F.: Ru and RuO2gate electrodes for advanced CMOS technology, Materials Sci Engn. B 109 (2004) 117–121.

Fröhlich, K., Hušeková, K., Machajdik, D., Lupták, R., Ťapajna, M., and Hooker, J.C.: Growth and properties of ruthenium based metal gates for pMOS devices. In: ASDAM 2004. Piscataway: IEEE 2004. S. 163-166.


Machajdik, D., Kobzev, A.P., Fröhlich, K., and Cambel, V.: RBS and ERD study of epitaxial RuO2 films deposited on different single crystal substrates, Vacuum 70 (2003) 313-317.


Fröhlich, K., Cambel, V., Machajdik, D., Baumann, P.K., Lindner, J., Schumacher, M., and Jurgensen H.: Low-temperature growth of RuO2 films for conductive electrode applications, Materials Sci in Semicond. Processing 5 (2002) 173-177.

Fröhlich, K., MachajdíkD., Cambel, V., Kostič, I., and Pignard, S.: Epitaxial growth of low-resistivity RuO2 films on (1 1 0 2)- oriented Al2O3 substrate, J. of Crystal Growth 235 (2002) 377-383.

Kováč, P., Hušek, I., Pachla, W., Melišek, T., Diduszko, R., Fröhlich, K., Morawski, A., Presz, A., and MachajdíkD.: Structure, grain connectivity and pinning of as-deformed commercial MgB2 powder in Cu and Fe/Cu sheaths, Supercond. Sci & Technol. 15 (2002) 1127-1132.

Španková, M., Vávra, I., Chromik, Š., Gaži, Š., Štrbik, V., Kúš, P., MachajdíkD., and Beňačka, Š.: Improvement of the superconducting properties of YBCO thin films upon annealing of CeO2/Al2O3 substrate, Thin Solid Films 416 (2002) 254-259.

Baumann, P.K., Doppelt, P., Fröhlich, K., Gueroudji, L., Cambel, V., MachajdíkD., Schumacher, M., Lindner, J., Schienle, F., Burgess, D., Strauch, G., Juergensen, H., Guillon, H., and Jimenez, C.: Platinum, ruthenium and ruthenium dioxide electrodes deposited by metal organic chemical vapor deposition for oxide applications, Integrated Ferroelectrics 44 (2002) 135.

Rosová, A., Fröhlich, K., and Machajdík, D.: Epitaxial growth of oxide thin films by MOCVD – characterization by TEM. In: Proc. of the 2nd (re-established) Annual Meeting of the Czechoslovak Microscopy Society. Ed. L. Frank. Brno, Czechosl. Microscopy Society 2002. P. 101-104. ISBN 80-238-8749-1.


Gilabert, A., Plecenik, A., Fröhlich, K., Gaži, Š., Pripko, M., Mozolová, Ž., MachajdíkD., Beňačka, Š., Medici, M.G., Grajcar, M., and Kúš, P.: Photoinduced insulator-metal transition in La 0.81MnO3/Al2O3/Nb tunnel junctions, Applied Physics Letters 78 (2001) 1712-1714.

Fröhlich, K., MachajdíkD., Cambel, V., Fedor, J., Pisch, A., and Lindner, J.: Growth of Ru and Ru2 films by metal-organic chemical vapour deposition, J. de Physique 11(2001) Pr3-325-332.

Fröhlich, K., Pripko, M., Vávra, I., Dénešová, K., and MachajdíkD.: Growth of magnetoresistant La1-xMnO3 films on r-plane cut sapphire, J. de Physique 11 (2001) Pr3-333-339.

MachajdíkD., Pevala, A., Fröhlich, K., Weiss, F., and Figueras, A.: Experimental study of the resolution function of a texture diffractometer, Materials Science Forum 378-381 (2001) 235-239.

Babonas, G-J., Reza, A., Fröhlich, K., Pripko, M., and MachajdikD.: Spectral ellipsometry of La1-xMnOfilms with different degree of epitaxy, J. de Physique 11 (2001) Pr11-181-185.

Pripko, M., Halabica, A., Fröhlich, K., Plecenik, A., Cambel, V., Chromik, Š., and MachajdíkD.: Growth and characterization of LaMnO3/SrTiO3, Bi-layer, J. de Physique 11(2001) Pr11-127-131.

Fröhlich, K., MachajdíkD., Cambel, V., Luptak, R., Pignard, S., Weiss, F., Baumann, P., and Lindner, J.: Substrate dependent growth of highly conductive RuO2 films, J. de Physique 11 (2001) Pr11-77-81.


Chromik, Š., Španková, M., Vávra, I., Gaži, Š., Cannaerts, M., Hellemans, L., MachajdíkD., and Beňačka, Š.: CeO2 buffer layers on R-plane Al2O3, Acta Physica Slovaca 50 (2000) 403-410.

Štrbík, V., Plecenik, A., Chromik, Š., Beňačka, Š., Zuzčák, M., MachajdíkD., and Kunc, M.: Properties of the interfaces in the YBa2Cu3Ox/Au and Tl2Ba2CaCu2Oy/Au heterostructures, Acta Physica Slovaca 50 (2000) 571-576.

Španková, M., Vávra, I., Gaži, Š., MachajdíkD., Chromik, Š., Fröhlich, K., Hellemans, L., and Beňačka, Š.: Growth and recrystallization of CeO2 thin films deposited on R-plane sapphire by off-axis RF sputtering, J. of Crystal Growth 218 (2000) 287-293.


MachajdíkD., Pevala, A., Rosová, A., Fröhlich, K., Šouc, J., Weiss, F., and Figueras, A.: On the problem of overlopping ω scans measured on thin films deposited on monocrystal substrates, J. of Applied Crystallography 32 (1999) 736-743.

Fröhlich, K., MachajdíkD., Hellemans, L., and Snauwaert, J.: Growth of high crystalline quality thin epitaxial CeO2 films on (1102) saphire, J. de Physique IV 9 (1999) Pr8-341-347.


Štrbík, V., Chromik, Š., Jergel, M., MachajdíkD ., Beňačka, Š., and Kobzev A.P.: Flux-creep mechanism of critical current limitation in Tl-based thin film microstrips, J. of Superconductivity 11 (1998) 65.

Fröhlich, K.,Šouc, J., MachajdíkD., Jergel, M., Snauwaert, J., and Hellemans, L.: Surface quality of epitaxial CeO2 thin films grown on sapphire by aerosol metal organic chemical vapour deposition, Chemical Vapor Deposition 4 (1998) 216.


Fröhlich, K., Šouc, J., Rosová, A., MachajdíkD.,Graboy, I.E.,Svetchnikov, V.L., Figueras, A. and Weis, F.: Superconducting YBa2Cu3O7 films prepared by aerosol metal organic chemical vapour deposition on Al2O3 substrate with CeO2 buffer layer, Supercond. Sci.& Technol. 10 (1997) 657.

Fröhlich, K., MachajdíkD., Vávra, I., Šouc, J., Rosová, A., Figueras, A., Weiss, F., and Dahmen, K.-H.: Growth of YBa2Cu3O7/CeO2/Al2O3 heteroepitaxial films by aerosol MOCVD, J. of Alloys and Compounds 251 (1997) 284.

Fröhlich, K.,Rosová, A., MachajdíkD., Šouc, J., Figueras, A., Weiss, F., Chenevier, B., and Snauwaert, J.: Growth and structure of buffer layers for high temperature superconducting films, Acta Physica Polonica A 92 (1997) 255.

Fröhlich, K.,Šouc, J., MachajdíkD., and Weiss, F.: YBa2Cu3O7 films grown on CeO2/Al2O3 substrate by aerosol MOCVD. In: Applied Superconductivity 1997, Inst. Phys. Conf. Series No. 158 (1997) 233.

Chromik, Š., Štrbík, V., Beňačka, Š., MachajdíkD ., Liday J., Kobzev A. P., and Vogrinčič P.: Properties of YBCO/PBCO/YBCO trilayer structures. In: Applied Superconductivity 1997, Inst. Phys. Conf. Series No. 158 (1997) 523.


Lalinský, T., Osvald, J., MachajdíkD ., Mozolová, Ž., Šišolák, J., Constantinidis, G., and Kobzev, A.P.: High-temperature stable Ir-Al/n-GaAs Schottky diodes: Effect of the barrier height controlling, J. of Vacuum Sci. and Technology 14 (1996) 657.

MachajdíkD.: Use of ion back scattering for study of crystal and real structures of materials. In: Materials Structure in Chemistry, Biology, Physics and Technology. Ed. R.Kužel, J.Hašek, J.Fiala. Praque Czech and Slovak Crystallographic Association 1996. P. 52.


Fröhlich, K., MachajdíkD., Rosová, A., Vávra, I., Weiss, F., Bochu, B., and Senateur, J.P.: Growth of SrTiO3 thin epitaxial films by aerosol MOCVD, Thin Solid Films 260 (1995) 187-191.

Weiss, F., Schmatz, U., Senateur, J.P., Fröhlich, K., MachajdíkD., Selbmann, D., Krellmann, M.: YBCO films with buffer layers on technical substrates prepared by aerosol MOCVD. In: Proc. of EUCAS 1995, Inst. of Phys. Conf. Series No. 148 (1995) 919.


Lobotka, P., Vávra, I., MachajdíkD ., Jergel, M., Gaži, Š., Rosseel, E., Baert, M., Bruynseraede, Y., Forsthuber, M., and Hilscher, G.: Commensurate vortex lattice in superconducting Nb/Ti multilayers, Physica C 229 (1994) 231.

Chenevier, B., Marsden, A., Weiss, F., MachajdíkD., and Fröhlich, K.: X-ray diffraction analysis of YBCO thin films synthesized by aerosol MOCVD, Physica C 235240 (1994) 657.

Kováč, P., Hušek, I., Fröhlich, K., Šouc, J., MachajdíkD., Tarenko, V., and Weiss, F.: Influence of heat treatment on the properties of Bi1.8Pb0.2Sr2Ca2Cu3Ox ceramics and Ag-sheathed tapes, Physica C 235-240 (1994) 3441.

Fröhlich, K., MachajdíkD., Weiss, F., Bochu, B.: Thin epitaxial CeO2 films prepared by aerosol MOCVD, Materials Lett. 21 (1994) 377.

Gregušová, D., Lalinský, T., Mozolová, Ž., MachajdíkD., Pochaba, I., Vávra, I., and Porges, M.: Characterization of WNx metallization prepared by ion implantation of nitrogen, Thin Solid Films 249 (1994) 250.


MachajdíkD. and Magro, Ch.: On the texturing in YBa2Cu3O7-x bulk sample prepared by melted stage crystalization. In: Proc.of EPDIC-2 Conf. Enschede 1992, Materials Sci. Forum 133-136 (1993) 859.

Heintz, J.M., Magro, C., Dordor, P., Chateigner, D., Germi, P., Pernet, M., MachajdíkD., and Bonnet, J.P.: Influence of addition of CuO-BaCuO2 on microstructure of melt-textured YBa2Cu3O7-x ceramics and relevant transport properties, Cryogenics 33 (1993) 270.

Fröhlich, K., Šouc, J., MachajdíkD., Pochaba, I., and Kliment, V.: Properties of thin superconducting YBa2Cu3O7-x films. In: Proc. 7th Czecho – Slova k Conf. on Thin Films. Ed.: V.Tvarožek. Liptovský Mikuláš 1993. P. 85.

Gregušová, D., Lalinský, T., MachajdíkD., Pochaba, I., and Porges, M.: The characterization of WNo films prepared by ion implantation of nitrogen. In: Proc. 7th Czecho – Slovak Co nf. on Thin Films. Ed.: V.Tvarožek. Liptovský Mikuláš 1993. P. 93.

Fröhlich, K., Šouc, J., MachajdíkD., Pochaba, I., Gömöry, F., and Kliment, V.: Properties of YBa2Cu3O7-x thin films prepared by MOCVD technique with post-deposition annealing. In: Applied Superconductivity 1. Ed. H.C.Freyhardt. Oberursel, DGM 1993. P. 395.


Fröhlich, K., Šouc, J., MachajdíkD., and Vávra, I.: Characterization of thin superconducting YBa2Cu3O7-x films prepared by MO CVD deposition, Materials Sci. Engn. B 14 (1992) 43.

Fröhlich, K., Šouc, J., Chromik, Š., and MachajdíkD.: MOCVD of YBa2Cu3O7-x thin films using Ba Flourocarbon-based precursor, Physica C 202 (1992) 121.

Lobotka, P., Forsthuber, M., Hilscher, G., Vávra, I., MachajdíkD., and Sendrák, R.: Evidence of superconductivity in W/Si and Nb/Ti thin film multilayers by AC susceptibility measurement, Slaboproudý obzor 53 (1992) 89.

Šouc, J., Fröhlich, K., and MachajdíkD.: Characterization of the thin YBaCuO superconducting films deposited on the MgO and SrTiO3 single crystals by MO CVD method using fluorocarbon-based precursor. In: Cryogenics 92. Brno, ČS VTS 1992. P. 159.

Chromik, Š., MachajdíkD., Šmatko, V., and Štrbík, V.: Oriented YBa2Cu3O7 thin films on sapphire and silicon substrates with Zr2 buffer layer. In: Proc. of the Int. Conf. Macroscopic Quantum Phenomena 1992. P. 269.

Lobotka, P., Vávra, I., MachajdíkD., Sendrák, R., and Jergel, M.: Superconducting properties of Nb/Ti multilayers in the parallel field. In: Proc. of the Int. Conf. Macroscopic Quantum Phenomena 1992. P. 293.

Chromik, Š., Vávra, I., Liday, J., MachajdíkD ., Šmatko, V., Beňačka, Š., Adam, R., and Štrbík, V.: The properties of preferentially oriented YBa 2Cu3O7-x thin films prepared by sequential deposition of BaF2, Cu and Y. In: Proc. of the Joint Europe-USA Conf. on Superconductivity. Paris, IITTE 1992. P. 133.

Vávra, I., Lobotka, P., Senderák, R., Beňačka, Š., and MachajdíkD.: Amorphous WxSiy/Si multilayers. In: Proc. 3rd Int. Conf. Amorphous Metal Mater. Topoľčianky, 1992. P. 69.


Šouc, J., MachajdíkD., Šmatko, V., Štrbík, V., Fröhlich, K., Hríb, Š., Štefánik, V., Kordoš, P., and Ivan, J.: Preparation and properties of Ba-deficient superconducting thin Y-Ba-Cu-O films, J. of Crystal Growth 107 (1991) 710.

Šouc, J., Fröhlich, K., Bukovenová, V., MachajdíkD., Šmatko, V., Chromik, Š., and Kliment, V.: Preparation of thin YBa2Cu3O7-x films by MO CVD method. In: Proc. 2ndCzechoslov. – Italian Symp. on Supercond. Bratislava, EÚ SAV 1991. P. 18.

MachajdíkD.: X-ray diffraction characterization of YBa2Cu3O7 thin films. In: Proc. 2nd Czechoslov. – Italian Symp. on Supercond. Bratislava, EÚ SAV 1991. P. 53.

Šouc, J., Fröhlich, K., MachajdíkD., Vávra, I., Chromik, Š., and Kliment, V.: Properties of YBa2Cu3O7-x MO CVD prepared thin films. In: Proc. 6th Int. Symp. on Weak Superconductivity. Ed. Š.Beňačka. Singapore, World Sci. Publ. 1991. P. 25.


Chromik, Š., Tollet, H., Creemens, C., MachajdíkD ., Šmatko, V., Bruynsereade, Y., Beňačka, Š.: The composi tion of high Tc superconducting Y-Ba-Cu-O thin films prepared by vacuum coevaporation, Physica Status Solidi A 114 (1989) 567.

Ilchamov, R.A., Li Jen Ho, Khusmurodov, S.S.,MachajdíkD., Osetinskij, G.M., Pajek, M., Sandrik, R. and Shirokov, D.M.: Hydrogen depth profiling by elastic recoil detection, Physica Status Solidi A 112 (1989) 781.

Fröhlich, K., MachajdíkD ., Zaťko, A., Rosová, A., and Takács, S.: Effects of deposition temperature on properties of CVD prepared Nb 3Ge superconductor, Czechoslovak J. of Physics B 39 (1989) 196.


Ilchamov, R.A., MachajdíkD. a Osetinskij, G.M.: Obrabotka spektrov uprugovo rassejania pri analize mnogoslojnych struktur. Preprint SUJV, Dubna, P10-87-926 (1987).

Ilkhamov, R.A. and MachajdíkD.: Preprint SÚJV P10-87-249. Dubna 1987.

Ilkhamov, R.A. and MachajdíkD.: Preprint SÚJV P10-87-535. Dubna 1987.


Ilchamov, R.A., Li Zen Cho, MachajdíkD., Osetinskij, G.M., Pajek, M., Ter-Nersesjan, V.E., Sandrik, R. a Chusmurodov, S.CH.: Opredelenie koncentracionnovo profilja vodoroda metodom izmerenija protonov otdaci. Preprint SUJV,Dubna, 14-86-807 (1986).

Ilchamov, R.A., Li Zen Cho, MachajdíkD. a Osetinskij, G.M.: Prog ramma rasčota koncentracionnovo profilja vodoroda po energetičeskim spektram protonov otdaci. Preprint SUJV,Dubna, P10-86-774 (1986).

Brylowska, I., Paprocki, K., MachajdíkD., and Subotowicz, M.: Ion induced silicide phase formation in Ni-Si system. In: Annales Universitatis Mariae Curie-Sklodowska, Lublin Polonia, Sect.AAA 16 (1986) 6.

Paprocki, K., Brylowska, I., MachajdíkD., Javorska, D., and Subotovicz, D.: Depth distribution of the Au-recoil atoms measured by means of RBS and radioactive methods. In: Proc. of Conf. on Surf. Physics. Lodz 1986. P. 282.


Ilchamov, R.A., MachajdíkD., Osetinskij, G.M., Razguljaev, I.I., Sandrik, R. a Pajek, M.: Ustanovka dlja issledovanija kristallov metodom obratnovo razsejania ionov. Preprint SUJV,Dubna, P13-85-288 (1985).


MachajdíkD.: Method for quantitative x-ray diffraction analysis of a single-phase sandvich-like crystalline film with slightly varying, Thin Solid Films 111 (1984) 269.

Černuško, V., Fröhlich, K., Jergel, M., MachajdíkD., Tarnovská, M., Fedorov, V.K., and Cheremnych, P.A.: Properties of Nb3Ge tape superconductor prepared by CVD method, J. de Physique 45 (1984) C1.


Kraus, I., Číčel, B., Samajova, E., and MachajdíkD.: Origin and distribution of clays resulting from alteration of rhyolite volcanic rocks in Central Slovakia (Czechoslovakia), Geol. Carpatica 33 (1982) 269.*


Číčel, B. and MachajdíkD.: Potassium and amonium treated montmorillonites, Clays and Clay Min. 29 (1981) 40.*

MachajdíkD . and Číčel, B.: Potassium and amonium treated montmorillonites, Clays and Clay Min. 29 (1981) 47.*

Černuško, V., Fröhlich, K., MachajdíkD., and Jergel, M.: Development of long Nb3Ge tape with Tc above 20K, IEEE Trans. on Magnetics 17 (1981) 2051.

Fröhlich, K., MachajdíkD ., Beňačka, Š., and Černuško, V.: On the T c measurement of Nb3Ge superconductors, Acta Physica Hungarica (1981) 81.


Číčel, B. and MachajdíkD.: Mixed-layering developed in smectites treated with potassium and ammonium ions. In: Proc. 8th Con. on Clay Min.& Pet., Teplice 1979. P. 65.*


Kranz, G., MachajdíkD., und Wiegmann, J.: Zür Variation des chemischen und strukturellen Aufbaus des wechsellagerungs-minerals im seilitzer Kaolin, Zeitschrift für Geol.Wiss. 11 (1978) 115.*

Číčel, B. und MachajdíkD.: Zür Charakterisierung von wechsellagerungsstrukturen die durch Kaliumbehandlung von smektiten enstehen, Silikattechnik 29 (1978) 259.*


MachajdíkD . and Číčel, B.: Diffe rences in staking-order of the I-M structures obtained in K-saturated montmorillonites. In: 7th Nat. Conf. on Clay Min. and Petrology. Praha 1977. P. 61.*


MachajdíkD . und Číčel, B.: Ordnungsg rad-analyse eines Tonminerals aus der grube Gelbe Birke, Erzgebirge, Zeitschrift für Geol.Wiss. (1976) 117.*


Machajdík, D . and Číčel, B.: Refinement of the crystal structure of a long spacing mica-like mineral from Surges bay, Tasmania. In:Proc. 5 th Nat. Conf. on Clay Min. and Petrology. Praha 1970. P. 57.*


Hanic, F. and MachajdíkD.: Crystal structure of Bis(2-imino-4-amino-methyl-pentane) Nickel(II) Nitrate, Chem. papers (Chem.zvesti)23 (1969) 3.*