FIB Laboratory

The laboratory provides characterization of the samples in various level of vacuum, micro and nano-patterning, 3D structure formation, manipulate objects with a micro-manipulator and deposit platinum patterns. It enables X-ray microanalysis (EDAX) for elemental analysis or chemical characterization.

Equipment:

• FEI Quanta 3D 200i – dual-beam scanning electron microscope (SEM) and focused ion beam (FIB)
• OXFORD Omniprobe AutoProbe 200 – micromanipulator
• AMETEK EDAX – elemental analysis or chemical characterization
• FEI Gas Injection System 20089-Q – platina deposition

Application:

• Scanning the surface with focused electrons or ion beam
• Sample preparation for SEM, TEM, EDS (cross-section analysis)
• Micro-machining – modification of the AFM tips, drilling patterns to modify the samples
• Deposit platinum to make a contacts
• Chemical analysis, which includes spectrum collection and qualitative and quantitative elemental mapping

Contact: Ing. M. Precner, PhD., Tel.: +421-2-5922 2480
Ing. E. Kováčová, Tel.: +421-2-5922 2470

Access: Individual access after introductory training (4 hours), online booking OR

Price: 0 Eur/hour for SAS employees

FEI Quanta 3D 200i dual-beam scanning electron microscope (SEM) and focused ion beam (FIB) with micromanipulator, EDAX analysis and gas injection system