At Institute of Electrical Engineering of the Slovak Academy of Sciences (IEE SAS) we have successfully expanded our technological portfolio with two state-of-the-art systems dedicated to nanotechnology research and development – the NANOFABRICATOR™ Lite from ATLANT 3D and the PICOMASTER 100 from RAITH. The installation of these instruments marks a significant step forward in strengthening research capabilities in semiconductor devices, advanced materials, and thin-film technologies in Slovakia.
The NANOFABRICATOR™ Lite is a unique system that combines thin-film deposition by ALD ( Atomic Layer Deposition ) with principles similar to 3D printing. This innovative approach enables the precise deposition of nanolayers with well-defined physicochemical properties only at selected locations on a substrate. As a result, researchers can fabricate complex material structures that would be extremely difficult – or even impossible – to achieve using conventional manufacturing methods.
The PICOMASTER 100 significantly enhances the capabilities of the institute’s cleanroom lithography facilities. It enables maskless (direct-write) lithography, eliminating the need for conventional photolithographic masks and providing greater flexibility in device fabrication. This approach substantially accelerates prototyping and the development of new designs while achieving feature resolutions of up to 300 nm.
Both systems, acquired through the STEPHANIK project, and represent far more than new laboratory equipment. They form the foundation of a unique technological infrastructure that will be available to researchers, industrial experts, and multidisciplinary teams working in advanced materials, micro- and nanotechnologies. At the same time, these new capabilities create opportunities for developing applications with potential use in the space sector.
STEPHANIK is an international technology consortium that brings together research institutions and industry partners. Its mission is to strengthen Slovakia’s research infrastructure and expand key technological capacities that support scientific excellence, innovation, and industrial competitiveness.
The acquisition of the NANOFABRICATOR™ Lite and PICOMASTER 100 demonstrates how strategic investment in research and technological development translates into tangible capabilities. These new systems will accelerate the journey from scientific concept to experiment, from design to prototype, and from research ambition to practical technological solutions. They will also foster closer collaboration between academia, industry, and international partners.
Funded by the European Union – NextGenerationEU through the Recovery and Resilience Plan of the Slovak Republic under project No. 09I02-03-V01-00038.
