Publications

Mgr. Michal Pecz

Publications for year 2026

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Publications

  • PECZ, Michal - IZSÁK, Tibor - STOKLAS, Roman - GREGUŠOVÁ, Dagmar - HUDEC, Boris. Atomic layer testing substrate (ALTS) for conformality evaluation of atomic layer deposition processes. In ASDAM 2026 : Conference Proceedings. The Sixteenth International Conference on Advanced Semiconductor Devices and Microsystems. Eds. E. Vavrinsky, J. Marek. - IEEE, 2026, p. 34-38. ISBN 979-8-3195-0043-4. . 09I02-03-V01-00038 : Slovenská technická ekosférická platforma. Typ: AFC