Topics
Scientists are invited to submit an abstract for oral or poster presentation in one or more of the following areas:
Emerging dielectric materials, technologies and new device approaches
- Theory of dielectric materials, interface science of dielectrics in contact with semiconductors & metals
- Advanced technologies for thin dielectric film growth (ALD, MOCVD, PLD, MBE,…)
- Characterisation of dielectrics with high sensitivity & spatial resolution, characterisation at nano-scale
- Multiferroics, 2-DEG at dielectric interfaces, emerging dielectric materials
- Novel oxide-based approaches to engineer SOI and GOI wafers
Dielectrics for aggressively scaled CMOS and other field effect devices
- High-k dielectrics on Si
- High-k dielectrics on high mobility semiconductors: Ge, III-V, III-N
- High-k/metal gate stack, characterisation, scaling, stability
- Defect characterisation, engineering of dielectrics, leakage currents
- Electrical characterisation and reliability of devices with alternative dielectrics
Dielectrics for memory applications
- High-k dielectrics for MIM (DRAM etc.)
- Resistive switching in dielectrics
- Dielectrics for non-volatile memories (flash, nanocrystal-based memories,…)
- Ferroelectrics
