Prednáška
Dňa 09. 07. 2010 sa na ElÚ SAV uskutočnila prednáška
Dr.Rer.Nat. Petera Šiffaloviča, PhD. s názvom:
GISAXS - probe of buried interfaces in vacuum deposited thin films
Abstrakt:
The quality of buried interfaces is an important issue in development of progressive
vacuum deposited thin film systems. The parameters describing buried interface morphology
are often difficult to obtain by standard imaging techniques like transmission electron
microscopy or scanning probe microscopy. The grazing-incidence small-angle X-ray
scattering (GISAXS) is an effective and non-destructive technique giving statistical non-local
information on morphology of buried interfaces.
We review GISAXS capabilities on two examples of thin multilayer films. As a
benchmark we selected a high quality multilayer system composed of W and B4C with a
period of 1.4 nm and 0.2 nm average interfacial roughness. Using GISAXS we demonstrate
estimation of multilayer growth model parameters like relaxation parameter, lateral
correlation length, Hurst parameter and lateral roughness replication shift. We also introduce
a class of mounded interfaces on example of magnetic multilayer system composed of NiFe 2
nm/Au 1.7 nm/ Co 0.7 nm/Au 1.7 nm. This system presents an academic example of
preferential replication of specific lateral roughness frequencies characteristic for mounded
interfaces.
Further we show that GISAXS technique is not necessarily connected with highbrilliance
synchrotron beamlines. A new table-top GISAXS workstation operating in ambient
air conditions will be presented and compared to the evacuated BW4 GISAXS beamline of
DORIS III synchrotron ring. The footprint of new GISAXS workstation is less than 3 m2. The
future directions for implementation of compact GISAXS technique for in situ monitoring in
vacuum deposition systems are discussed.
Kontakt: peter.siffalovic@savba.sk
Pozvánka